Aluminum (Al) coatings were deposited on Zr-4 alloy substrate by magnetron sputtering. The microstructure parameters of the as-deposited coating were characterized by means of scanning electron microscope (SEM), energy dispersive spectroscopy (EDS), X-ray diffraction (XRD) and electron backscattered scattering detection (EBSD). The results showed that: via the SEM and EDS, it can be found that Al atoms and Zr atoms undergo rapid interdiffusion at the interface, forming an Al-Zr diffusion layer with a thickness of about 1.5 mu m; via X-ray diffraction line broadening, the estimated crystal size...
