In this paper,the calibration of 220 Rn measurement about semiconductor detec-tion-based 220 Rn measurement instrument have been accomplished. And the peak overlap factor and the calibration coefficient were determined by multi-channel pulse amplitude an-alyzer and 220 Rn flow-through source respectively. The results of experiment showed that the probability of 6 . 78 MeVα particle emitted by 216 Po slowing down to the 6 . 00 MeVαparticle counts region can’t be ignored,and it can take 0. 0897,9. 4004 as typical values of peak overlap factor ...