Dimensional analysis and finite element method(FEM) have been used in this paper to investigate the conical indentation of elastic plastic film/substrate systems.The scaling relationships derived from dimensional analysis bridge the indentation response and the elastic-plastic properties of both film and substrate.Several key variables of an indentation curve are revealed and examined,which can indicate that the maximum indentation force depends on the elastic-plastic properties of both film and substrate and the initial unloading slope is in...