期刊论文

Wang, Yongqiang;Huang, H

英文

International Journal of Mechanical Sciences

0020-7403

2023

259

108619

10.1016/j.ijmecsci.2023.108619

Natural Science Foun-dation of Hunan Province [2021JJ30578]; Scientific Research Foundation of Hunan Provincial Education Department [22A0312]; China Scholarship Council [201808430059]; Australia Research Council (ARC) through Dis-covery Project program [DP220103222]

本校为第一机构

Gallium nitride (GaN) is a hard and brittle single crystal and shaping it into thin substrates for semiconductor applications is challenging. The quality of the machined surface can vary depending on the cutting orientation, primarily due to the hexagonal lattice structure of GaN. Therefore, understanding how crystallite orientation affects the cutting performance is crucial before developing a cost-effective machining process for GaN. This study used molecular dynamics (MD) simulation to investigate the cutting of GaN along different crystal orientations. Single grit cutting was performed to ...