The reactive gas fuzzy controller adopts ARM micro controller LPC2210 of PHILIPS Co.as the core of the control system.Many kinds of anti-interference method and a very reliable data storage technology are adopted in the design of the software and the hardware system,to ensure that the controller owns the fast-speed voltage auto holding ability,and the key constant-voltage process of the technique requirement can be realized.The experiment results of the controller are presented and analyzed,proving out that the controller can be used in different sputtering techni...
