Adhesion;Bond strength (materials);Magnetron sputtering;Microstructure;Residual stresses;Scanning electron microscopy;Substrates;Surface roughness;Tin;Titanium nitride;X ray diffraction;Zirconium compounds;Accident tolerant fuels;Adhesion properties;Direct current magnetron sputtering;Roughness of substrates;Sputtering power;Stress magnitude;TiN coating;X ray diffractometers;Coatings
This work was supported by CNNC funded project (Research on ATF technology), Scientific research fund of Hunan Provincial Education Department ( 16C1383 ) and University of South China doctorate funding project ( 2015XQD14 ). The authors are grateful to other participants of the project for their cooperation.
机构署名：
本校为第一且通讯机构
院系归属：
机械工程学院
摘要：
TiN coatings have been deposited on Zr-4 substrates using direct current (DC) magnetron sputtering and the effects of roughness of substrate and sputtering power on the microstructure, thickness/deposition rate, adhesion properties and residual stress of coatings have been studied. The microstructures of the coatings were characterized by using scanning electron microscope (SEM) and X-ray diffractometer (XRD). The thicknesses of the coatings were detected by using SEM. The adhesion property was tested by using scratch testing. The residual stre...
