期刊论文

Yi, R;Deng, H

英文

Journal of Solid State Electrochemistry

1432-8488

2024

1-14

10.1007/s10008-024-06004-3

This project is supported by the National Natural Science Foundation of China (52035009 and 52005243), the Science and Technology Innovation Committee of Shenzhen Municipality (JCYJ20200109141003910, JCYJ20210324120402007, and KQTD20170810110250357), and the Doctoral Research Initiation Fund Project of University of South China.

本校为第一且通讯机构

Surface structuring has attracted growing interest in the industry due to its potential to improve the macroscopic properties of workpieces. This work investigated the surface structuring of metals by combining thermal oxide film mask and laser lithography with isotropic etching. The metals were thermally oxidized to form a protective oxide film, laser ablation patterned the thermal oxide film, while electrochemical etching operated in the isotropic mode obtained an array of hemispherical cavities. The isotropic etching potential for different metals is taken from the mass transport region of ...