To study the characteristics of radio frequency (RF) power coupling, RF plasma diagnostics, actively cooled tube, and negative ion production, a plasma source was designed as a small-scale test facility. The matching network was carefully designed and successfully applied to the 2-MHz RF plasma source. In this article, the design method of the matching unit will be presented; with the assistance of this matching unit, the RF plasma source was successfully lit and the reflected power was reduced to a very low level. A V-I probe was installed in ...
