Nanoscale structuring on La0.7Sr0.3MnO3 (LSMO) thin film surfaces has been performed by scanning tunneling microscopy (STM) under ambient conditions. From line etching experiments we found that the line-depth increases in a stepwise fashion with increasing bias voltage. It also increases with decreasing scan speed and increasing scan repetition. We observed that the line-depth is an integral multiple of the LSMO out-of-plane lattice constant about 0.4 nm. Lateral structure with minimum feature size of 1 nm is possible to obtain. In addition, a four-level inverse-pyramid structure has been crea...
