期刊论文

Numerical Study on Influence of Operating Frequency and Plasma Torch Structure on Characteristics of Radio-frequency-inductive Coupled Plasma

Tong, H.

中文

高电压技术

1003-6520

2019

45

1

316-323

10.13336/j.1003-6520.hve.20181229030

基金资助项目：国家自然科学基金(11535003, 11675074)；湖南省教育厅 项目(15C1174)。 Project supported by National Natural Science Foundation Program (11535003, 11675074), Fund Project of Hunan Province Education Office(15C1174).

本校为第一机构

为研究射频感应等离子体(RFICP)受等离子体发生器装置结构及工作频率的影响效应,以期可以为装置的正常工作提供参考,首先建立了射频感应热等离子体的湍流模型,然后利用商业软件ANSYS FLUENT对等离子体发生器装置内的纯氩气热等离子体温度及流场分布进行了计算,并研究了工作频率及装置结构的变化对射频感应等离子体传热及流动特性的影响。研究结果表明:提高装置的工作频率、增大等离子体炬内半径、增加射频线圈匝数并减小两匝线圈间距均能使发生器装置内的等离子体轴向速度减小,等离子体温度显著增加,并对等离子体炬内的流场分布产生较大的影响。因此可以通过改变相应的装置结构及工作频率来控制...

In order to investigate the effects of operating frequency and structure of plasma generator equipment on the characteristics of radio frequency inductively coupled plasma (RFICP) so as to provide valuable theoretical guidelines for design and work of plasma generator equipment, we established a turbulence model of the inductively coupled plasma, and calculated the spatial distribution of temperature, velocity and electromagnetic field for argon thermal plasma by using the ANSYS FLUENT software. Moreover, we studied the influences of operating ...