Femtosecond laser ablation of Zr-based metallic glasses in air, including micro-drilling, trenching and cutting, has been investigated. The surface profile of the ablated glass and the associated effect in the ablation area were examined by means of scanning electron microscope (SEM), energy dispersive X-ray (EDX) analysis, transmission electron microscope (TEM) and electron diffraction. These studies indicate that slight oxidation occurs at the machined region. Molten trace, spatter and crystallization are not found in the vicinity of machined area. The result shows that femtosecond laser abl...
