Geant4 is used widely in the research about nuclear technology since it is fast, flexible and convenient. By use of Geant4, aim at the method of coating's thickness measuring based on X-ray fluorescence, optimization design of excitation source, the position of the detector placed influence on detection efficiency, the range of coating thickness measuring etc problems are studied. Getting the relationship between characteristic X-ray's intensity of different base metal and thickness change, the X fluorescence space geometric distribution and op...