Research on Energy Dissipation Mechanism of Cobweb-like Disk Resonator Gyroscope

首页 > 成果 > 详情

认领

导出

Link by DOI

反馈

作者信息关键词期刊信息基础信息归属信息摘要

成果类型：

期刊论文

作者：

Yi, Huang;Fan, Bo;Bu, Feng;Chen, Fang;Luo, Xiao-Qing

通讯作者：

Fan, B;Chen, F

作者机构：

[Luo, Xiao-Qing; Fan, Bo; Yi, Huang] Univ South China, Sch Elect Engn, Hengyang 421001, Peoples R China.

[Fan, Bo] Soochow Univ, Sch Elect & Informat Engn, Suzhou 215006, Peoples R China.

[Bu, Feng] Suzhou Vocat Univ, Sch Elect Informat Engn, Suzhou 215104, Peoples R China.

[Chen, Fang; Chen, F] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China.

[Luo, Xiao-Qing] Univ South China, Hunan Prov Key Lab Ultrafast Micro Nano Technol, Adv Laser Manufacture, Hengyang 421001, Peoples R China.

通讯机构：

[Fan, B ] U

[Chen, F ] C

Univ South China, Sch Elect Engn, Hengyang 421001, Peoples R China.

Soochow Univ, Sch Elect & Informat Engn, Suzhou 215006, Peoples R China.

Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China.

语种：

英文

关键词：

air damping;disk resonator gyroscope;energy dissipation;thermoelastic damping

期刊：

MICROMACHINES

ISSN：

2072-666X

年：

2024

卷：

期：

DOI：

10.3390/mi15111380

基金类别：

National Key Research and Development Program of China; Scientific Research Fund of Hunan Provincial Education Department [22C0219]; [2022YFB3205000]; [2022YFB3205004]

机构署名：

本校为第一且通讯机构

院系归属：

电气工程学院

摘要：

The micro disk resonator gyroscope is a micro-mechanical device with potential for navigation-grade applications, where the performance is significantly influenced by the quality factor, which is determined by various energy dissipation mechanisms within the micro resonant structure. To enhance the quality factor, these gyroscopes are typically enclosed in high-vacuum packaging. This paper investigates a wafer-level high-vacuum-packaged (

反馈

产权有误：本人成果被他人认领

数据有误：数据基本信息有误

归属有误：成果的院系归属、机构署名归属有误

其他原因：

验证码：

看不清楚，换一个

确定

取消

成果认领

标题：

用户	作者	通讯作者	--
	请选择	请选择	--

确定

取消

Research on Energy Dissipation Mechanism of Cobweb-like Disk Resonator Gyroscope

反馈

成果认领

提示

该栏目需要登录且有访问权限才可以访问