A third-order resonant circuit is connected to a full-bridge RF power supply to improve the fast switching states of MOSFET. By connecting the third-order resonant circuit at the AC terminals of a full-bridge inverter, the third-order sine-like resonant current is superimposed on a sinusoidal load current, which helps to quickly charge or discharge the output capacitance of each MOSFET and makes it suitable for higher operation frequencies. Simulation results obtained from a 2 MHz/2 kW RF power supply show that the connection of a third-order resonant circuit not only reduces the commutation t...
