National Natural Science Foundation of China [51805240]; Scientific Research Foundation of University of South China
机构署名：
本校为第一机构
院系归属：
机械工程学院
摘要：
Temperature-dependent material attrition and subsurface lattice damage of single-crystal AlN at various scratching depths/forces are investigated at atomic level using molecular dynamics simulation. An ultimate removal precision of depth down to monolayer of AlN is achieved based on the present temperature-dependent critical conditions. The number of worn atoms, positively influenced by temperature due to the reduction of hardness, increases exponentially with increasing normal force in the plastic domain. Archard-type wear coefficient K values calculated at different temperatures increase lin...
