Titanium nitride (TiN) coatings were deposited on Zr-4 substrate by direct current magnetron sputtering. The microstructural property of the as-deposited coating was studied by means of x-ray diffraction (XRD). The microstructural parameters, such as crystal size, lattice strain, lattice deformation stress and lattice deformation energy density, were investigated in detail by employed modified Debye–Scherrer method (MDS) and Williamson-Hall methods by assuming three models namely uniform deformation model, uniform stress deformation model and ...
