Ultra-precision contact-type form measuring probe for on-machine measurement was developed. The advantages of this probe are following: the measuring force is so light (about 100~150 mgf) that no scratch is given to the measured object and the measuring error caused by the tilt and slip of the probe shaft on the object is much smaller. The movement of the probe shaft is detected with the very small type of laser interferometric differential sensor, so the linearity and repeatability of the measured data is much better than that from such conventional sensor as the linear variable differential ...
