版权说明 操作指南
首页 > 成果 > 详情

Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control

认领
导出
Link by DOI
反馈
分享
QQ微信 微博
成果类型:
期刊论文
作者:
Bu, Feng;Fan, Bo;Xu, Dacheng;Guo, Shuwen;Zhao, Heming
通讯作者:
Feng Bu
作者机构:
[Bu, Feng] Suzhou Vocat Univ, Sch Elect & Informat Engn, Suzhou 215104, Peoples R China.
[Fan, Bo] Univ South China, Sch Elect Engn, Hengyang 421001, Peoples R China.
[Xu, Dacheng; Zhao, Heming; Fan, Bo; Guo, Shuwen; Bu, Feng] Soochow Univ, Sch Elect & Informat Engn, Suzhou 215006, Peoples R China.
通讯机构:
[Feng Bu] S
School of Electronic and Information Engineering, Suzhou Vocational University, Suzhou 215104, People's Republic of China<&wdkj&>School of Electronic and Information Engineering, Soochow University, Suzhou 215006, People's Republic of China
语种:
英文
关键词:
MEMS gyroscope;force rebalance closed-loop;bandwidth;noise-equivalent rate
期刊:
Journal Of Micromechanics And Microengineering
ISSN:
0960-1317
年:
2021
卷:
31
期:
6
页码:
065002
基金类别:
Key Projects of National Natural Science Foundation of ChinaNational Natural Science Foundation of China (NSFC) [61434003]; Suzhou Vocational University high level introduction of talent research start-up fund [202105000002]
机构署名:
本校为其他机构
院系归属:
电气工程学院
摘要:
The force-to-rebalance (FTR) closed-loop detection method is commonly used to expand the bandwidth (BW) for micro-electro-mechanical system (MEMS) gyroscopes with low-frequency split and high-quality factors. However, the relationship between the BW and output noise is often incompatible; thus, reducing the detection accuracy of the gyroscope. This paper presents an analysis of the BW and noise spectra under modulation-demodulation FTR gyroscopes. The expressions for the BW and the noise-equivalent rate (NER) spectrum are derived to explore the effects of the loop gain on the BW and NER. It is...

反馈

验证码:
看不清楚,换一个
确定
取消

成果认领

标题:
用户 作者 通讯作者
请选择
请选择
确定
取消

提示

该栏目需要登录且有访问权限才可以访问

如果您有访问权限,请直接 登录访问

如果您没有访问权限,请联系管理员申请开通

管理员联系邮箱:yun@hnwdkj.com