Proceedings of the Second International Symposium on Instrumentation Science and Technology
年：
2002
页码：
4/294-4/299
机构署名：
本校为第一且通讯机构
院系归属：
机械工程学院
摘要：
This system uses air springs and rubber layer as passive vibration isolation elements and giant magnetostrictive actuators as active vibration isolation elements. Actuators and air springs are arranged in parallel. The air springs and the rubber layer of the passive system are synthesized so as to minimize the root-mean-square values of amplitude of the micro-manufacturing platform and the discrete time LQG controller based on a state space model is employed for controlling actuators. Simulation studies show that the developed active vibration control system has good isolation performance agai...
