期刊论文

Effect of Substrate Temperature on Microstructure and Properties of TiN Coating on Zirconium Alloy

中文

机电工程技术

1009-9492

2022

51

02

31-34

10.3969/j.issn.1009-9492.2022.02.007

耐事故燃料包壳锆合金表面多层纳米复合涂层表征及腐蚀行为研究（编号：190SYS007）；

本校为第一机构

为了研究磁控溅射过程中基体温度对涂层结构和性能的影响。利用磁控溅射技术在Zr-4合金表面制备不同基体温度下的TiN涂层，用X射线衍射（XRD）技术分析涂层的物相成分和残余应力，采用扫描电子显微镜（SEM）表征涂层表面和截面的微观形貌，用划痕仪测量涂层与基体结合强度。研究结果表明：不同基体偏压下制备的涂层表面均匀但略微粗糙，且涂层表面存在一定数量的熔覆状颗粒和沟壑状褶皱；由涂层XRD衍射谱可知，不同基体加热温度制备的涂层各主要衍射峰所对应的晶体晶相都能较好地对应，随着基体加热温度的升高，TiN（1 1 1）晶相的衍射峰值逐步增大，TiN（2 0 0）晶相衍射峰值逐步减小；由扫描电...

In order to study the effect of substrate temperature on the structure and properties of coatings during magnetron sputtering.TiN coatings at different substrate temperatures were prepared on the surface of Zr-4 alloy by magnetron sputtering.The phase composition and residual stress of the coating were analyzed by X-ray diffraction(XRD),the micro morphology of the surface and section of the coating were characterized by scanning electron microscope(SEM),and the bonding strength between the coating and the substrate was measured by scratch teste...